Chip machinery maker ASML said on Wednesday it has booked net profit of just over €1bn in 2013, compared with €1.15bn in the previous year.

Turnover rose to €5.25bn over the year as a whole, after reaching a record €1.85bn in the fourth quarter.

The company said in a statement it reiterates its previous forecast that net sales in the first half of 2014 will be around €3bn, ‘creating a solid basis for the remainder of 2014’.

According to the Financieele Dagblad, the results outstrip market forecasts. ASML, which counts Intel and Samsung among its investors, is currently investing considerable sums in developing a new generation of machines.

ASML is traditionally one of the first companies to report full year figures.